Formation method of semiconductor device with fin structures

ABSTRACT

A method for forming a semiconductor device structure is provided. The method includes forming a first conductive feature over a semiconductor substrate. The method includes forming an oxygen-absorbing layer on a surface of the first conductive feature. The oxygen-absorbing layer absorbs oxygen from the first conductive feature and becomes an oxygen-containing layer. The method includes removing the oxygen-containing layer to expose the surface originally covered by the oxygen-containing layer. The method includes forming a metal-containing layer on the surface. The method includes forming a second conductive feature on the metal-containing layer.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a Continuation of U.S. application Ser. No.16/058,095, filed on Aug. 8, 2018, the entirety of which is incorporatedby reference herein. The U.S. application Ser. No. 16/058,095 claims thebenefit of U.S. Provisional Application No. 62/697,694, filed on Jul.13, 2018, the entirety of which is incorporated by reference herein.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experienced rapidgrowth. Technological advances in IC materials and design have producedgenerations of ICs. Each generation has smaller and more complexcircuits than the previous generation.

In the course of IC evolution, functional density (i.e., the number ofinterconnected devices per chip area) has generally increased whilegeometric size (i.e., the smallest component (or line) that can becreated using a fabrication process) has decreased. This scaling-downprocess generally provides benefits by increasing production efficiencyand lowering associated costs.

However, these advances have increased the complexity of processing andmanufacturing ICs. Since feature sizes continue to decrease, fabricationprocesses continue to become more difficult to perform. Therefore, it isa challenge to form reliable semiconductor devices at smaller andsmaller sizes.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It shouldbe noted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1I are cross-sectional views of various stages of a process forforming a semiconductor device structure, in accordance with someembodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Furthermore, spatially relative terms, such as “beneath,” “below,”“lower,” “above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Some embodiments of the disclosure are described. Additional operationscan be provided before, during, and/or after the stages described inthese embodiments. Some of the stages that are described can be replacedor eliminated for different embodiments. Additional features can beadded to the semiconductor device structure. Some of the featuresdescribed below can be replaced or eliminated for different embodiments.Although some embodiments are discussed with operations performed in aparticular order, these operations may be performed in another logicalorder.

Embodiments of the disclosure may relate to FinFET structure havingfins. The fins may be patterned by any suitable method. For example, thefins may be patterned using one or more photolithography processes,including double-patterning or multi-patterning processes. Generally,double-patterning or multi-patterning processes combine photolithographyand self-aligned processes, allowing patterns to be created that have,for example, pitches smaller than what is otherwise obtainable using asingle, direct photolithography process. For example, in someembodiments, a sacrificial layer is formed over a substrate andpatterned using a photolithography process. Spacers are formed alongsidethe patterned sacrificial layer using a self-aligned process. Thesacrificial layer is then removed, and the remaining spacers may then beused to pattern the fins. However, the fins may be formed using one ormore other applicable processes.

FIGS. 1A-1I are cross-sectional views of various stages of a process forforming a semiconductor device structure, in accordance with someembodiments. As shown in FIG. 1A, a semiconductor substrate 100 isprovided or received. In some embodiments, the semiconductor substrate100 is a bulk semiconductor substrate, such as a semiconductor wafer.For example, the semiconductor substrate 100 includes silicon or otherelementary semiconductor materials such as germanium. The semiconductorsubstrate 100 may be un-doped or doped (e.g., p-type, n-type, or acombination thereof).

In some other embodiments, the semiconductor substrate 100 includes acompound semiconductor. The compound semiconductor may include siliconcarbide, gallium arsenide, indium arsenide, indium phosphide, one ormore other suitable compound semiconductors, or a combination thereof.

In some embodiments, the semiconductor substrate 100 is an active layerof a semiconductor-on-insulator (SOI) substrate. The SOI substrate maybe fabricated using a separation by implantation of oxygen (SIMOX)process, a wafer bonding process, another applicable method, or acombination thereof. In some other embodiments, the semiconductorsubstrate 100 includes a multi-layered structure. For example, thesemiconductor substrate 100 includes a silicon-germanium layer formed ona bulk silicon layer.

As shown in FIG. 1A, one or more recesses (or trenches) are formed inthe semiconductor substrate 100, in accordance with some embodiments. Asa result, one or more fin structures are formed or defined between therecesses. In FIG. 1A, one of the fin structures (the fin structure 102)is shown. In some embodiments, one or more photolithography and etchingprocesses are used to form the recesses. In some embodiments, the finstructure 102 is in direct contact with the semiconductor substrate 100.

However, embodiments of the disclosure have many variations and/ormodifications. In some other embodiments, the fin structure 102 is notin direct contact with the semiconductor substrate 100. One or moreother material layers may be formed between the semiconductor substrate100 and the fin structure 102. For example, a dielectric layer may beformed between the semiconductor substrate 100 and the fin structure102.

As shown in FIG. 1A, an isolation feature 104 is formed in the recessesto surround lower portions of the fin structure 102, in accordance withsome embodiments. The isolation feature 104 is used to define andelectrically isolate various device elements formed in and/or over thesemiconductor substrate 100. In some embodiments, the isolation feature104 includes shallow trench isolation (STI) features, local oxidation ofsilicon (LOCOS) features, another suitable isolation feature, or acombination thereof.

In some embodiments, the isolation feature 104 has a multi-layerstructure. In some embodiments, the isolation feature 104 is made of adielectric material. The dielectric material may include silicon oxide,silicon nitride, silicon oxynitride, fluoride-doped silicate glass(FSG), low-K dielectric material, one or more other suitable materials,or a combination thereof. In some embodiments, an STI liner (not shown)is formed to reduce crystalline defects at the interface between thesemiconductor substrate 100 and the isolation feature 104. Similarly,the STI liner may also be used to reduce crystalline defects at theinterface between the isolation feature 104 and the fin structure 102.

In some embodiments, a dielectric material layer is deposited over thesemiconductor substrate 100. The dielectric material layer covers thefin structure 102 and fills the recesses between the fin structure 102and other fin structures. The dielectric material layer may be depositedusing a chemical vapor deposition (CVD) process, an atomic layerdeposition (ALD) process, a physical vapor deposition (PVD) process, aspin-on process, one or more other applicable processes, or acombination thereof.

In some embodiments, a planarization process is then used to thin downthe dielectric material layer until the fin structure 102 or hard maskelements defining the fin structures are exposed. The planarizationprocess may include a chemical mechanical polishing (CMP) process, agrinding process, a dry polishing process, an etching process, one ormore other applicable processes, or a combination thereof. Afterwards,the dielectric material layer is etched back such that the fin structure102 protrudes from the top surface of the remaining dielectric materiallayer after the etching process. As a result, the remaining portions ofthe dielectric material layer form the isolation feature 104, as shownin FIG. 1A.

Afterwards, dummy gate stacks (not shown) are formed over thesemiconductor substrate 100 to partially cover the fin structure 102, inaccordance with some embodiments. The dummy gate stacks include a gateelectrode and a gate dielectric layer. In some embodiments, a gatedielectric material layer and a gate electrode material layer aredeposited over the isolation feature 104 and the fin structure 102.Afterwards, the gate dielectric material layer and the gate electrodematerial layer are patterned to form the dummy gate stacks.

In some embodiments, spacer elements 112 are formed over sidewalls ofthe dummy gate stacks. The spacer elements 112 may be used to assist inthe formation of source and drain structures (or regions) in subsequentprocesses. In some embodiments, the spacer elements 112 are made of orinclude silicon nitride, silicon oxynitride, silicon carbide, siliconcarbon oxynitride, one or more other suitable materials, or acombination thereof.

In some embodiments, a spacer layer is deposited over the semiconductorsubstrate 100, the fin structure 102, and the dummy gate stacks. Thespacer layer may be deposited using a CVD process, an ALD process, a PVDprocess, a spin-on process, one or more other applicable processes, or acombination thereof. Afterwards, an etching process, such as ananisotropic etching process, is performed to partially remove the spacerlayer. As a result, the remaining portions of the spacer layer over thesidewalls of the dummy gate stacks form the spacer elements 112.

Afterwards, the fin structure 102 is partially removed to form recesses,in accordance with some embodiments. In some embodiments, the finstructure 102 is recessed to a level below the top surfaces of theisolation feature 104. In some embodiments, an etching process is usedto form the recesses 114.

Many variations and/or modifications can be made to embodiments of thedisclosure. In some other embodiments, the fin structure 102 is notrecessed. In some other embodiments, the fin structure 102 is merelythinned without being recessed to a level below the top surfaces of theisolation feature 104.

Afterwards, one or more semiconductor materials are epitaxially grownover the fin structure 102 to fill the recesses, in accordance with someembodiments. As a result, one or more epitaxial structures are formed.In FIG. 1A, one of the epitaxial structures (the epitaxial structure106) is shown. The epitaxial structure 106 may function as a source ordrain structure. The epitaxial structure 106 may also function as astressor to improve carrier mobility.

In some embodiments, the epitaxial structure 106 is made of one or morep-type semiconductor materials. For example, the epitaxial structure 106may include epitaxially grown silicon germanium, germanium, one or moreother suitable materials, or a combination thereof. In some otherembodiments, the epitaxial structure 106 is made of one or more n-typesemiconductor materials. The epitaxial structure 106 may includeepitaxially grown silicon, epitaxially grown silicon carbide (SiC), oranother suitable epitaxially grown semiconductor material.

In some embodiments, the epitaxial structure 106 is formed using aselective epitaxy growth (SEG) process, a CVD process (e.g., avapor-phase epitaxy (VPE) process, a low pressure chemical vapordeposition (LPCVD) process, and/or an ultra-high vacuum CVD (UHV-CVD)process), a molecular beam epitaxy process, an ALD process, one or moreother applicable processes, or a combination thereof. The formationprocess of the epitaxial structure 106 may use gaseous and/or liquidprecursors.

In some embodiments, the epitaxial structure 106 includes dopants. Forexample, the epitaxial structure 106 is p-type doped, and the dopantsmay include boron, gallium, one or more other suitable dopants, or acombination thereof. The epitaxial structure 106 may also be n-typedoped, and the dopants may include phosphor. In some embodiments, theepitaxial structure 106 is doped in-situ during the growth of theepitaxial structure 106. In some other embodiments, the epitaxialstructure 106 is not doped during the growth of the epitaxial structure106. In some embodiments, one or more implantation processes are used todope the epitaxial structure 106. After the epitaxial growth, theepitaxial structure 106 is doped in a subsequent process.

In some embodiments, the doping is achieved using an ion implantationprocess, a plasma immersion ion implantation process, a gas and/or solidsource diffusion process, one or more other applicable processes, or acombination thereof. In some embodiments, the epitaxial structure 106 isfurther exposed to one or more annealing processes to activate thedopants. For example, a rapid thermal annealing process is used.

In some embodiments, a dielectric material layer is deposited over theepitaxial structure 106, the isolation feature 104, and the dummy gatestacks. The dielectric material layer may be made of or include siliconoxide, silicon oxynitride, borosilicate glass (BSG), phosphoric silicateglass (PSG), borophosphosilicate glass (BPSG), fluorinated silicateglass (FSG), low-k material, porous dielectric material, one or moreother suitable dielectric materials, or a combination thereof. In someembodiments, the dielectric material layer is deposited using a CVDprocess, an ALD process, a PVD process, a spin-on process, one or moreother applicable processes, or a combination thereof.

Afterwards, the dielectric material layer is thinned until the dummygate stacks are exposed. The dielectric material layer may be thinneduntil the hard mask elements used for defining the dummy gate stacks areexposed. Alternatively, the dielectric material layer may be thinneduntil the dummy gate stacks are exposed. After the thinning process ofthe dielectric material layer, the remaining portion of the dielectricmaterial layer forms the dielectric layer 110, as shown in FIG. 1A. Thedielectric layer 110 covers the epitaxial structure 106 and surroundsthe dummy gate stacks.

Afterwards, a gate replacement process may be performed. The dummy gatestacks are removed to form trenches. Then, metal gate stacks 117 areformed in the trench. Each of the metal gate stacks 117 may include ahigh-k gate dielectric layer 114 and a metal electrode 116. The metalelectrode 116 may include a work function layer and a metal fillingsurrounded by the work function layer.

As shown in FIG. 1B, a dielectric layer 118 is deposited over thedielectric layer 110 and the metal gate stacks 117, in accordance withsome embodiments. The material and formation method of the dielectriclayer 110 may be the same as or similar to those of the dielectric layer104.

Afterwards, the dielectric layers 110 and 118 are partially removed toform a contact opening that exposes the epitaxial structure 106, inaccordance with some embodiments. The contact opening may be formedusing a photolithography process and an etching process.

As shown in FIG. 1B, a metal-semiconductor compound region 108 isformed, in accordance with some embodiments. The metal-semiconductorregion may help to reduce resistance between the epitaxial structure 106and a conductive contact to be formed over the epitaxial structure 106.The metal-semiconductor compound region 108 may be made of or includemetal silicide material, a silicon-germanium-metal-containing material,a germanium-metal-containing material, or a combination thereof.

In some embodiments, a surface portion of the epitaxial structure 106 ismodified to have lower crystallinity than an inner portion of theepitaxial structure 106. The lower crystallinity of the surface portionmay facilitate the subsequent formation of the metal-semiconductorregion 108. The surface portion may be modified using an ionimplantation process.

Afterwards, a metal-containing material is applied (or deposited) on theepitaxial structure 106 while the epitaxial structure 106 is heated, inaccordance with some embodiments. Because the metal-containing materialis applied during the heating of the epitaxial structure, the thermalenergy may help to initiate chemical reaction between the surfaceportion of the epitaxial structure 106 and the metal-containingmaterial. As a result, a surface portion of the epitaxial structure 106reacts with the metal-containing material and is transformed into themetal-semiconductor compound region 108.

Afterwards, a barrier layer 120 and a conductive contact 122 are formedin the contact opening, as shown in FIG. 1B in accordance with someembodiments. The barrier layer 120 may be made of or include titaniumnitride, cobalt nitride, tantalum nitride, one or more other suitablematerials, or a combination thereof. The conductive contact 122 may bemade of or include cobalt, ruthenium, titanium, tungsten, molybdenum,one or more other suitable materials, or a combination thereof. Theformation of the barrier layer 120 and the conductive contact 122 mayinvolve a CVD process, an ALD process, one or more other applicableprocesses, or a combination thereof. A planarization process may also beused to assist in the formation of the barrier layer 120 and theconductive contact 122. The planarization process may include a CMPprocess, a grinding process, an etching process, a dry polishingprocess, one or more other applicable processes, or a combinationthereof.

As shown in FIG. 1C, an etch stop layer 124 is deposited over thedielectric layer 118 and the conductive contact 122, in accordance withsome embodiments. The etch stop layer 124 may be made of or includesilicon nitride, silicon oxynitride, silicon carbide, siliconoxycarbide, aluminum oxide, one or more other suitable materials, or acombination thereof. The etch stop layer 124 may be deposited using aCVD process, an ALD process, a PVD process, one or more other applicableprocesses, or a combination thereof.

However, many variations and/or modifications can be made to embodimentsof the disclosure. In some other embodiments, the etch stop layer 124 isnot formed.

As shown in FIG. 1C, a resistive layer 126 is formed over the etch stoplayer 124, in accordance with some embodiments. The resistive layer 126may be a portion of a passive element such as a resistor. The resistivelayer 126 may be made of or include tantalum nitride, titanium nitride,amorphous silicon, one or more other suitable materials, or acombination thereof. The resistive layer 126 may be deposited using aCVD process, an ALD process, a PVD process, one or more other applicableprocesses, or a combination thereof.

Afterwards, a dielectric layer 128 is deposited over the etch stop layer124 and the resistive layer 126, as shown in FIG. 1C in accordance withsome embodiments. The material and formation method of the dielectriclayer 128 may be the same as or similar to those of the dielectric layer110.

Afterwards, openings 130A, 130B, and 130C are formed to respectivelyexpose the metal gate stack 117, the conductive contact 122, and theresistive layer 126, as shown in FIG. 1C in accordance with someembodiments. The formation of the openings 130A, 130B, and 130C mayinvolve one or more photolithography processes and one or more etchingprocesses. In some cases, the surfaces of the conductive featuresexposed by the openings 130A, 130B, and/or 130C may be slightlyoxidized, which may increase resistance between the conductive featuresand subsequently formed conductive structures.

As shown in FIG. 1D, oxygen-absorbing layers 134A, 134B, and 134C arerespectively formed on the metal gate stack 117, the conductive contact122, and the resistive layer 126, in accordance with some embodiments.In some embodiments, the oxygen-absorbing layers 134A, 134B, and 134Care made of or include aluminum. In some embodiments, a modificationoperation 132 is used to modify the surface quality of the metal gatestack 117, the conductive contact 122, and the resistive layer 126. Themodification operation 132 may be used to selectively form theoxygen-absorbing layers 134A, 134B, and 134C on the metal gate stack117, the conductive contact 122, and the resistive layer 126,respectively.

In some embodiments, the oxygen-absorbing layers 134A, 134B, and 134Care formed using an aluminum-containing precursor. Thealuminum-containing precursor may be made of or includetriethylaluminum, dimethylaluminumhydride, trimethylaluminum,dimethylethylamine alane, one or more other suitable precursors, or acombination thereof. In some embodiments, the aluminum-containingprecursor is applied or provided on the conductive feature(s) includingthe metal gate stack 117, the conductive contact 122, and the resistivelayer 126 to form aluminum-containing layers. The aluminum-containinglayers may be made of aluminum. The aluminum-containing layer may have athickness that is in a range from about 5 Å to about 10 Å.

In some embodiments, the aluminum-containing precursor is applied usinga CVD process. The aluminum-containing layers may be selectively formedon surfaces of metal elements. The operation temperature may be in arange from about 250 degrees C. to about 550 degrees C. The operationpressure may be in a range from about 0.5 torrs to about 5 torrs. Theoperation time may be in a range from about 30 seconds to about 120seconds. The deposition conditions (such as the operation time) may beused to control the thickness of the oxygen-absorbing layers 134A, 134B,and 134C.

As mentioned earlier, the surfaces of the conductive features exposed bythe openings 130A, 130B, and/or 130C may be slightly oxidized. Theoxygen-absorbing layers 134A, 134B, and 134C may absorb oxygen from theconductive features including the metal gate stack 117, the conductivecontact 122, and the resistive layer 126 and becomes oxygen-containinglayers. The conductive features may therefore have better conductivitysince the oxidized portions are reduced to metal states.

As shown in FIG. 1E, once the oxygen-absorbing layers 134A, 134B, and134C are deposited on the metal gate stack 117, the conductive contact122, and the resistive layer 126, the oxygen-absorbing layers 134A,134B, and 134C may soon absorb oxygen from the surface portions of themetal gate stack 117, the conductive contact 122, and the resistivelayer 126. As a result, oxygen-containing layers 136A, 136B, and 136Care formed, as shown in FIG. 1E in accordance with some embodiments. Insome embodiments, the oxygen-containing layers 136A, 136B, and 136C aremade of or include aluminum oxide.

In some other embodiments, oxygen-absorbing layers 134A, 134B, and 134Care made of or include silicon. A silicon-containing precursor (such assilane) may be used to form thin silicon films on the metal gate stack117, the conductive contact 122, and the resistive layer 126. Thesilicon layers may also act as oxygen-absorbing layers to form theoxygen-containing layers 136A, 136B, and 136C as shown in FIG. 1E. Inthese cases, the oxygen-containing layers 136A, 136B, and 136C are madeof or include silicon oxide.

As shown in FIG. 1F, a modification operation 138 is used to provide ametal-containing precursor on the oxygen-containing layers 136A, 136B,and 136C, in accordance with some embodiments. The metal-containingprecursor is capable of removing the entire oxygen-containing layers136A, 136B, and 136C. After the removal of the entire oxygen-containinglayers 136A, 136B, and 136C, the provided metal-containing precursorcontinues to respectively and selectively form metal-containing layer140A, 140B, and 140C on the metal gate stack 117, the conductive contact122, and the resistive layer 126, as shown in FIG. 1G in accordance withsome embodiments.

In some embodiments, the metal-containing precursor includes atungsten-containing precursor. The tungsten-containing precursor mayinclude WCl₅, and the metal-containing layer 140A, 140B, and 140C may bemade of or include tungsten. In some embodiments, the metal-containingprecursor is substantially fluorine free. Because the metal-containingprecursor is substantially fluorine free, the device elements thereundermay be prevented from being negatively affected by fluorine. In someembodiments, the metal-containing precursor is selectively applied onthe metal gate stack 117, the conductive contact 122, and the resistivelayer 126 using an atomic layer deposition (ALD) process.

In some embodiments, the operation temperature of the ALD process is ina range from about 300 degrees C. to about 550 degrees C. The operationpressure may be in a range from about 15 torrs to about 40 torrs. Eachof the metal-containing layers 140A, 140B, and 140C may have a thicknessthat is in a range from about 10 Å to about 50 Å. In some embodiments,the cycle number of the ALD process may be adjusted to control thethicknesses of the metal-containing layers 140A, 140B, and 140C.

In some other embodiments, the metal-containing precursor includesTaCl₅, MoCl₅, or a combination thereof. In these cases, themetal-containing layers 140A, 140B, and 140C may be made of or includeTa or Mo. In some other embodiments, another precursor such as BCl₃ maybe used to replace the metal-containing precursor.

The metal-containing precursor may act as an etching gas to remove theoxygen-containing layers 136A, 136B, and 136C. The metal-containingprecursor may also act as a selective metal growth precursor to form ametal layer (or metal protection layer) on the conductive featuresincluding the metal gate stack 117, the conductive contact 122, and theresistive layer 126.

As shown in FIG. 1H, conductive features 142A, 142B, and 142C arerespectively formed on the metal-containing layers 140A, 140B, and 140C,in accordance with some embodiments. Each of the conductive features142A, 142B, and 142C may be made of or include ruthenium, cobalt,tungsten, molybdenum one or more other suitable materials, or acombination thereof. In some embodiments, the conductive features 142A,142B, and 142C are selectively grown on the metal-containing layers140A, 140B, and 140C, respectively.

In some embodiments, a CVD process is used to form the conductivefeatures 142A, 142B, and 142C. The operation temperature may be in arange from about 250 degrees C. to about 300 degrees C. The operationpressure may be in a range from about 5 torrs to about 15 torrs. Thereaction gas used for forming the conductive features 142A, 142B, and142C may include WF₆, C₅H₅(CO)₂Co, Ru₃(CO)₁₂, one or more other suitableprecursors, or a combination thereof. In some embodiments, H₂ and/or Arare also used. The thickness of the conductive features 142A, 142B, and142C may be in a range from about 300 Å to about 1500 Å, which may becontrolled by the operation time.

As shown in FIG. 11, a planarization process is used to provide theconductive features 142A, 142B, and 142C with substantially planar topsurfaces, in accordance with some embodiments. The planarization processmay include a chemical mechanical polishing (CMP) process, a drypolishing process, an etching process, a grinding process, one or moreother applicable processes, or a combination thereof. The top surfacesof the conductive features 142A, 142B, and 142C may be substantiallycoplanar with the top surface of the dielectric layer 128.

In some embodiments, the metal-containing layers 140A, 140B, and 140Cinclude a trace amount of atoms from the oxygen-containing layers 136A,136B, and 136C. In some embodiments, the metal-containing layers 140A,140B, and 140C include aluminum residue. In these cases, a trace amountof aluminum may be detected in the metal-containing layers 140A, 140B,and 140C.

In some embodiments, the modification operation 132 illustrated in FIG.1D, the modification operation 138 illustrated in FIGS. 1F and 1G, andthe formation of the conductive features illustrated in FIG. 1H arein-situ performed using the same process tool. The semiconductor devicestructure is prevented from becoming polluted or damaged. The electricalconnection between the conductive features 142A, 142B, and 142C and theconductive features including the metal gate stack 117, the conductivecontact 122, and the resistive layer 126 are greatly improved.

Embodiments of the disclosure form an oxygen-absorbing layer over aconductive feature. The oxygen-absorbing layer absorbs oxygen from theconductive feature to form an oxygen-containing layer. Even if theconductive feature may be slightly oxidized, the oxygen is removed bythe oxygen-absorbing layer. The conductive feature itself may haveimproved conductivity. Afterwards, a metal-containing precursor is usedto remove the oxygen-containing layer and form a metal layer on theconductive feature to protect the conductive feature thereunder. Asecond conductive feature is then formed on the metal layer. Theelectrical connection between the conductive feature and the secondconductive feature is greatly improved.

In accordance with some embodiments, a method for forming asemiconductor device structure is provided. The method includes forminga first conductive feature over a semiconductor substrate. The methodincludes forming an oxygen-absorbing layer on a surface of the firstconductive feature. The oxygen-absorbing layer absorbs oxygen from thefirst conductive feature and becomes an oxygen-containing layer. Themethod includes removing the oxygen-containing layer to expose thesurface originally covered by the oxygen-containing layer. The methodincludes forming a metal-containing layer on the surface. The methodincludes forming a second conductive feature on the metal-containinglayer.

In accordance with some embodiments, a method for forming asemiconductor device structure is provided. The method includesselectively forming an oxygen-absorbing layer on a surface of a firstmetal-containing element. The oxygen-absorbing layer absorbs oxygen fromthe first metal-containing element and becomes an oxygen-containinglayer. The method includes removing the entire oxygen-containing layerto expose the surface originally covered by the oxygen-containing layer.The method includes selectively forming a metal-containing layer on thesurface. The method includes forming a second metal-containing elementon the metal-containing layer.

In accordance with some embodiments, a method for forming asemiconductor device structure is provided. The method includes forminga first metal-containing element over a semiconductor substrate. Themethod includes forming a metal layer on a surface of the firstmetal-containing element. The metal layer absorbs oxygen from the firstmetal-containing element and becomes an oxygen-containing layer. Themethod includes etching the oxygen-containing layer to expose thesurface originally covered by the oxygen-containing layer. The methodincludes forming a metal-containing layer on the surface. The methodincludes forming a second metal-containing element on themetal-containing layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method for forming a semiconductor devicestructure, comprising: forming a first conductive feature over asemiconductor substrate; forming an oxygen-absorbing layer on a surfaceof the first conductive feature, wherein the oxygen-absorbing layerabsorbs oxygen from the first conductive feature and becomes anoxygen-containing layer; removing the oxygen-containing layer to exposethe surface originally covered by the oxygen-containing layer; forming ametal-containing layer on the surface; and forming a second conductivefeature on the metal-containing layer.
 2. The method for forming asemiconductor device structure as claimed in claim 1, wherein theremoving of the oxygen-containing layer comprises: applying ametal-containing precursor on the oxygen-containing layer to remove theoxygen-containing layer.
 3. The method for forming a semiconductordevice structure as claimed in claim 2, wherein the forming of themetal-containing layer on the surface comprises: continuing to apply themetal-containing precursor on the surface to form the metal-containinglayer on the surface, wherein after removing the oxygen-containinglayer, the surface originally covered by the oxygen-containing layer isdirectly exposed to the metal-containing precursor to form themetal-containing layer on the surface
 4. The method for forming asemiconductor device structure as claimed in claim 1, wherein the firstconductive feature is a metal gate stack.
 5. The method for forming asemiconductor device structure as claimed in claim 1, wherein the firstconductive feature is a conductive contact electrically connected to asource/drain structure.
 6. The method for forming a semiconductor devicestructure as claimed in claim 1, wherein the first conductive feature isa portion of a passive element.
 7. The method for forming asemiconductor device structure as claimed in claim 1, wherein theoxygen-absorbing layer comprises an aluminum layer, and theoxygen-containing layer comprises an aluminum oxide layer.
 8. The methodfor forming a semiconductor device structure as claimed in claim 1,wherein the oxygen-absorbing layer comprises a silicon layer, and theoxygen-containing layer comprises a silicon oxide layer.
 9. The methodfor forming a semiconductor device structure as claimed in claim 1,wherein the metal-containing precursor comprises a tungsten-containingprecursor.
 10. The method for forming a semiconductor device structureas claimed in claim 9, wherein the metal-containing precursor issubstantially fluorine free.
 11. The method for forming a semiconductordevice structure as claimed in claim 1, wherein the metal-containingprecursor comprises WCl₅, TaCl₅, MoCl₅, or a combination thereof.
 12. Amethod for forming a semiconductor device structure, comprising:selectively forming an oxygen-absorbing layer on a surface of a firstmetal-containing element, wherein the oxygen-absorbing layer absorbsoxygen from the first metal-containing element and becomes anoxygen-containing layer; removing the entire oxygen-containing layer toexpose the surface originally covered by the oxygen-containing layer;selectively forming a metal-containing layer on the surface; and forminga second metal-containing element on the metal-containing layer.
 13. Themethod for forming a semiconductor device structure as claimed in claim12, wherein the removing of the oxygen-containing layer comprises:selectively providing a metal-containing precursor on theoxygen-containing layer to remove the oxygen-containing layer.
 14. Themethod for forming a semiconductor device structure as claimed in claim13, wherein the selectively forming of the metal-containing layer on thesurface comprises: continuing selectively providing the metal-containingprecursor on the surface to form the metal-containing layer on thesurface, wherein after removing the oxygen-containing layer, the surfaceoriginally covered by the oxygen-containing layer is directly exposed tothe metal-containing precursor to form the metal-containing layer on thesurface.
 15. The method for forming a semiconductor device structure asclaimed in claim 12, further comprising: forming a dielectric layer overthe first metal-containing element; and forming an opening in thedielectric layer to expose the first metal-containing element beforeselectively forming the oxygen-absorbing layer.
 16. The method forforming a semiconductor device structure as claimed in claim 12, whereinthe oxygen-absorbing layer is formed using an aluminum-containingprecursor.
 17. The method for forming a semiconductor device structureas claimed in claim 12, wherein the metal-containing precursor containstungsten, tantalum, or molybdenum.
 18. The method for forming asemiconductor device structure as claimed in claim 12, wherein themetal-containing precursor contains chlorine.
 19. A method for forming asemiconductor device structure, comprising: forming a firstmetal-containing element over a semiconductor substrate; forming a metallayer on a surface of the first metal-containing element, wherein themetal layer absorbs oxygen from the first metal-containing element andbecomes an oxygen-containing layer; etching the oxygen-containing layerto expose the surface originally covered by the oxygen-containing layer;forming a metal-containing layer on the surface; and forming a secondmetal-containing element on the metal-containing layer.
 20. The methodfor forming a semiconductor device structure as claimed in claim 19,wherein the etching of the oxygen-containing layer and the forming ofthe metal-containing layer on the surface comprise: providing ametal-containing precursor on the oxygen-containing layer using anatomic layer deposition process to etch the oxygen-containing layer andto continue to selectively form the metal-containing layer on thesurface, wherein after etching the oxygen-containing layer, the surfaceoriginally covered by the oxygen-containing layer is directly exposed tothe metal-containing precursor to form the metal-containing layer on thesurface.